Blank Cover Image

Study of lag effect in LPHD plasma etching ofSi for MEMS applications by variable time steps in numerical methods [6032-17]

Author(s):
Publication title:
ICO20 : MEMS, MOEMS, and NEMS : 21-26 August, 2005, Changchun, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6032
Pub. Year:
2006
Page(from):
60320H
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819460639 [081946063X]
Language:
English
Call no.:
P63600/6032
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings An ICP etch model based on time multiplexed deep etching [6032-16]

Zhang, J., Huang, -A. Q., Li, -H. W.

SPIE - The International Society of Optical Engineering
7 Conference Proceedings Numerical simulation and experimental study of time-resolved optical tomographic imaging

Zhao,H., Gao,F., Niu,H., Li,J., Zhang,H.

SPIE - The International Society for Optical Engineering
2 Conference Proceedings Measurement of residual stress in multilayered thin films by a full-field optical method [6032-21]

Nie, M., Huang, -A. Q., Li, W.

SPIE - The International Society of Optical Engineering
8 Conference Proceedings Application of twelve variables gradient method to the study of poly (ss-hydroxybutyrate) crystallization

Li, H., Ma, S., Xing, D., Tong, J., Li, L.A., Wang, S., Cheng, G.

SPIE-The International Society for Optical Engineering
3 Conference Proceedings Comparison of Residual Stress Measured by Diffraction Method and Matrix Etching Method in SiC Fiber Reinforced Titanium Matrix Composites

M. Wen, H. Huang, H. Li, M. Wu, C.Q. Hu, K. Zhang, W.T. Zheng

Trans Tech Publications
9 Conference Proceedings Preliminary report of clinical application of hematoporphyrin monomethyl ether in photodynamic therapy for alimentary cancers

Y. Gu, J.-H. Li, D.-Y. Xu, Z.-Q. Zhang, Y.-C. Huang

Society of Photo-optical Instrumentation Engineers
4 Conference Proceedings Theory and simulation of MEMS deformable mirror [6032-19]

Yan, J., Zhao, Y., Yu, F., Zhu, Y., Zhang, H.

SPIE - The International Society of Optical Engineering
10 Conference Proceedings Structural design of novel low-actuation MEMS switches for X-band application

Zheng, W.-B., Huang, Q.-A., Li, F.-X.

SPIE-The International Society for Optical Engineering
5 Conference Proceedings Compact 8-way fast high voltage pulses generation with variable pulse width and interval time

J. Liu, F. Zhang, L. Li, L. Niu, W. Peng, J. Shi, Q. Yang, H. Niu

SPIE - The International Society of Optical Engineering
11 Conference Proceedings APPLICATIONS OF PLASMA ETCHING

Lehmann W. H.

Kluwer Academic Publishers
6 Conference Proceedings Negative chemical amplification process simulation in integrated circuits and microelectomechanical systems fabrication [6032-15]

Zhou, -F. Z., Huang, -A. Q., Li, -H. W., Lu, W., Southeast Univ. (China)

SPIE - The International Society of Optical Engineering
12 Conference Proceedings Effect of Spark Plasma Sintering Temperature on the Consolidation of SiC Fiber Reinforced Titanium Alloy Matrix Composites

M.J. Wang, H. Huang, M. Wen, H. Li, X. Huang, S.M. Zhang

Trans Tech Publications
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12