Blank Cover Image

Negative chemical amplification process simulation in integrated circuits and microelectomechanical systems fabrication [6032-15]

Author(s):
Publication title:
ICO20 : MEMS, MOEMS, and NEMS : 21-26 August, 2005, Changchun, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6032
Pub. Year:
2006
Page(from):
60320F
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819460639 [081946063X]
Language:
English
Call no.:
P63600/6032
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings An ICP etch model based on time multiplexed deep etching [6032-16]

Zhang, J., Huang, -A. Q., Li, -H. W.

SPIE - The International Society of Optical Engineering
7 Conference Proceedings Selection and attributes of objective function of electro-optical system vulnerbility to ECM(EOSVECM)

Zhang,J., Zhou,Y., An,W., Jiang,W., Lu,Q., Huang,H.

SPIE-The International Society for Optical Engineering
2 Conference Proceedings Simulation of integrated circuits fabrication processes

Antoniadis A. D., Dutton W.

Noordhoff International Publishing
8 Conference Proceedings Equivalent circuit macromodel for a beam-structure electromechanical system in F-I analogy

Rong, H., Huang, Q.-A., Li, W.H.

SPIE-The International Society for Optical Engineering
3 Conference Proceedings Study of lag effect in LPHD plasma etching ofSi for MEMS applications by variable time steps in numerical methods [6032-17]

Zhang, J., Huang, -A. Q., Li, -H. W.

SPIE - The International Society of Optical Engineering
9 Conference Proceedings Simulation of the Chinese airborne SAR image spectrum

Huang, W., Yang, J., Xiao, Q., Zhou, C.

SPIE - The International Society of Optical Engineering
4 Conference Proceedings Landscape pattern dynamic change analysis based on eco-hydrological process in the lower reaches of Tarim River, China

Q. Huang, Q. Zhou, X. Cheng, W. Wang, H. Zhang

Society of Photo-optical Instrumentation Engineers
10 Conference Proceedings Urban Dynamic Change Detection Using Interferometric SAR in Southeast China

H. Chi, F. Ling, Q. Wang

ESA Communications
5 Conference Proceedings Anticounterfeit holograms in China

D. Hsu, J. Zhou, W. Pei, Q. Li, X. Huang

Society of Photo-optical Instrumentation Engineers
11 Conference Proceedings Design research of nanopositioner based on SPM and its simulation of FEM [6032-09]

Zhang, Z., Li, H., Zhou, H., Li, L., Liu, X.

SPIE - The International Society of Optical Engineering
6 Conference Proceedings 3D photoresist etching simulation using cellular automata [6034-26]

Zhou Z. F, Huang Q. A, Li W.-H, Da F.-P, Shen H. P

SPIE - The International Society of Optical Engineering
12 Conference Proceedings Fabrication and analysis of optoelectronic integrated circuits with one selective area growth

Zhou,W., Ervin,M.H.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12