Monolithic PZT microstage wth multidegrees of freedom for high-precision positioning [6032-05]

Monolithic PZT microstage wth multidegrees of freedom for high-precision positioning [6032-05]

Author(s):

Xu, G. H. ( Tohoku Univ. (Japan) )
Okamoto, K. ( NEC Tokin Corp. (Japan) )
Zhang, Y. D. ( Beihang Univ. (China) )
Ono, T.
Esashi, M. ( Tohoku Univ. (Japan) )

Publication title:

ICO20 : MEMS, MOEMS, and NEMS : 21-26 August, 2005, Changchun, China

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

6032

Pub. Year:

2006

Page(from):

603205

Page(to):

603205

Pages:

1

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819460639 [081946063X]

Language:

English

Call no.:

P63600/6032

Type:

Conference Proceedings

Details

TDL ID:	ZA00016067
Series ID:	PA00000029
Conf. info. (Name):	ICO
Conf. info. (Number):	2005 : 20th
Conf. info. (Venue):	Changchun, China
Conf. info. (Date):	2005.08.21-2005.08.26

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