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Photoluminescene properties of hydrogenated amorphous silicon nitride thin films deposited by helicon wave plasma chemical vapor deposition [6020-123]

Author(s):
Fu G.
Yu W.
Lu W.
Zhu H.
Zhang L.
Ding W. ( Hebei Univ. (China) )
1 more
Publication title:
Optoelectronic Materials and Devices for Optical Communications
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6020
Pub. date:
2005
Page(from):
60203E
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819460516 [0819460516]
Language:
English
Call no.:
P63600/6020
Type:
Conference Proceedings

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