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Effect of radio frequency bias on the optical and structural properties of nanocrystalline SiC films deposited by helicon wave plasma enhanced chemical vapor deposition [6020-122]

Author(s):
Publication title:
Optoelectronic Materials and Devices for Optical Communications
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6020
Pub. date:
2005
Page(from):
60203D
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819460516 [0819460516]
Language:
English
Call no.:
P63600/6020
Type:
Conference Proceedings

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