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Design and fabrication of low-microwave loss coplannar waveguide and precise V groove on silicon substrate for optoelectronic packaging [6019-118]

Author(s):
Yang H.
Zhu H.
Xie H.
Zhao L.
Zhou F.
Wang W. ( Institute of Semiconductors (China) )
1 more
Publication title:
Passive Components and Fiber-based Devices II
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6019
Pub. date:
2005
Page(from):
601938
Page(to):
601938
Pages:
1
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819460509 [0819460508]
Language:
English
Call no.:
P63600/6019
Type:
Conference Proceedings

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