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Nanoscale deformation measurements to improve reliability assessment of sensors and MEMS [6179-19]

Author(s):
  • Michel, B. ( Fraunhofer Institute for Reliability and Microintegration (Germany) )
  • Keller, J. ( Fraunhofer Institute for Reliability and Microintegration (Germany) and Angewandte Micro-Messtechnik GmbH (Germany) )
  • Walter, H. ( Angewandte Micro-Messtechnik GmbH (Germany) )
Publication title:
Advanced sensor technologies for nondestructive evaluation and structural health monitoring II : 1-2 March 2006, San Diego, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6179
Pub. Year:
2006
Page(from):
61790J
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819462329 [0819462322]
Language:
English
Call no.:
P63600/6179
Type:
Conference Proceedings

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