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Scatterometry based CD and profile metrology of MoSi/ quartz structures [5992-153]

Author(s):
Yedur, S.
Vuong, V. ( Timbre Technologies Inc. (USA) )
Shivaprasad, D.
Sarathy, T. P.
Tabet, M.
Korlahalli, R.
Hu, J. ( Nanometrics Inc. (USA) )
2 more
Publication title:
25th Annual BACUS Symposium on Photomask Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5992
Pub. date:
2005
Pt.:
2
Page(from):
59924I
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819460141 [0819460141]
Language:
English
Call no.:
P63600/5992
Type:
Conference Proceedings

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