Detailed characterization of inspection tools: capabilities and limitations of the KLA 576 [5992-192]
- Author(s):
- Heumann, J.
- Moses, R.
- Holfeld, C. ( Advanced Mask Technology Ctr. (Germany) )
- Schmidt, N.
- Aquino, C. ( KLA-Tencor Corp (USA) )
- Publication title:
- 25th Annual BACUS Symposium on Photomask Technology
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5992
- Pub. Year:
- 2005
- Pt.:
- 2
- Page(from):
- 599246
- Page(to):
- 599247
- Pages:
- 2
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819460141 [0819460141]
- Language:
- English
- Call no.:
- P63600/5992
- Type:
- Conference Proceedings
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