Model-based insertion and optimization of assist features with application to contact layers [5992-71]
- Author(s):
Shang, S. D. Granik, Y. Swallow, L. ( Mentor Graphics Corp. (USA) ) Zhang, L. ( Mentor Graphics Corp. (China) ) Brist, T. Torres, A. ( Mentor Graphics Corp. (USA) ) Hung, C. Liu, Q. ( Semiconductor Manufacturing International Corp. (China) ) - Publication title:
- 25th Annual BACUS Symposium on Photomask Technology
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5992
- Pub. Year:
- 2005
- Pt.:
- 1
- Page(from):
- 59921Y
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819460141 [0819460141]
- Language:
- English
- Call no.:
- P63600/5992
- Type:
- Conference Proceedings
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