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Modeling OPC complexity for design for manufacturability [5992-69]

Author(s):
  • Gupta, P. ( Blaze DFM Inc. (USA) )
  • Kahng, A. B. ( Blaze DFM Inc. (USA) and Univ. of California, San Diego (USA) )
  • Muddu, S. ( Univ. of California, San Diego (USA) )
  • Nakagawa, S. ( Blaze DFM Inc. (USA) )
  • Park, C. ( Univ. of California, San Diego (USA) )
Publication title:
25th Annual BACUS Symposium on Photomask Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5992
Pub. Year:
2005
Pt.:
1
Page(from):
59921W
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819460141 [0819460141]
Language:
English
Call no.:
P63600/5992
Type:
Conference Proceedings

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