Blank Cover Image

Mask pattern quality assurance based on lithography simulation with fine pixel SEM image [5992-59]

Author(s):
Kariya, M.
Yamanaka, E.
tanaka, S.
Ikeda, T.
Yamaguchi, S.
Hashimoto, K.
Itoh, M. ( Toshiba Corp. (Japan) )
Kobayashi, H.
Kawashima, T.
Narukawa, S. ( Dai Nippon Printing Co., Ltd. (Japan) )
5 more
Publication title:
25th Annual BACUS Symposium on Photomask Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5992
Pub. Year:
2005
Pt.:
1
Page(from):
59921M
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819460141 [0819460141]
Language:
English
Call no.:
P63600/5992
Type:
Conference Proceedings

Similar Items:

Yamanaka, E., Kariya, M., Yamaguchi, S., Tanaka, S., Hashimoto, K., Itoh, M., Kobayashi, H., Kawashima, T., Narukawa, S.

SPIE - The International Society of Optical Engineering

A. Mimotogi, M. Itoh, S. Mimotogi, K. Sato, T. Sato, S. Tanaka

SPIE - The International Society of Optical Engineering

Kariya, M., Yamanaka, E., Tanaka, S., Ikeda, T., Yamaguchi, S., Itoh, M., Kobayashi, H., Kawashima, T., Narukawa, S.

SPIE - The International Society of Optical Engineering

K. Otsubo, S. Yamaguchi, Y. Arisawa, H. Mukai, T. Kotani, H. Mashita, H. Hashimoto, T. Kamo, T. Tsutsui, O. Ikenaga

SPIE - The International Society of Optical Engineering

M. Satake, M. Kariya, S. Tanaka, K. Hashimoto, S. Inoue

SPIE - The International Society of Optical Engineering

H. Mukai, Y. Kobayashi, S. Yamaguchi, K. Kawano, K. Hashimoto

Society of Photo-optical Instrumentation Engineers

S. Yamaguchi, E. Yamanaka, H. Mukai, T. Kotani, H. Mashita

Society of Photo-optical Instrumentation Engineers

S. Miyoshi, Y. Kobayashi, S. Tanaka, K. Kawano, K. Hashimoto

Society of Photo-optical Instrumentation Engineers

Yamaguchi, S., Itoh, M., Ikeda, T., Miyano, Y., Mitsui, T., Amma, M., Horikawa, S.

SPIE - The International Society of Optical Engineering

Lee, D., Chu, B., Fang, T. Y., Shieh, W. B., Hu, S., Chen, J. -H., Morgan, R.

SPIE - The International Society of Optical Engineering

6 Conference Proceedings A photomask defect evaluation system

Yamanaka, E., Kanamitsu, S., Hirano, T., Tanaka, S., Ikeda, T., Ikenaga, O., Kawashima, T., Narukawa, S., Kobayashi, H.

SPIE - The International Society of Optical Engineering

M. Saito, M. Itoh, O. Ikenaga, K. Ishigo

Society of Photo-optical Instrumentation Engineers

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12