Blank Cover Image

CD metrology of binary and phase shift masks using scatterometry [5992-55]

Author(s):
Publication title:
25th Annual BACUS Symposium on Photomask Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5992
Pub. date:
2005
Pt.:
1
Page(from):
59921I
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819460141 [0819460141]
Language:
English
Call no.:
P63600/5992
Type:
Conference Proceedings

Similar Items:

Lee, K., Yedur, S., Tavassoli, M., Baik, K., Tabet, M.

SPIE - The International Society of Optical Engineering

Lee, K., Yedur, S., Cheng, W., Tovassoli, M., Baik, K.

SPIE - The International Society of Optical Engineering

Lee, M. K., Yedur, S., Hetzer, D., Tavassoli, M., Baik, K.

SPIE - The International Society of Optical Engineering

Klos,M.A., Yedur,S.K.

SPIE - The International Society for Optical Engineering

Lee, K. M., Yedur, S., Henrichs, S., Tavassoli, M.

SPIE - The International Society of Optical Engineering

E. Gallagher, C. Benson, M. Higuchi, Y. Okumoto, M. Kwon, S. Yedur, S. Li, S. Lee, M. Tabet

SPIE - The International Society of Optical Engineering

K. M. Lee, S. Yedur, S. Henrichs, M. Tavassoli, K. Baik

SPIE - The International Society of Optical Engineering

K. M. Lee, M. Tavassoli, U. Buttgereit, D. Seidel, R. Birkner

Society of Photo-optical Instrumentation Engineers

Cho, S., Yedur, S., Kwon, M., Tabet, M.

SPIE - The International Society of Optical Engineering

S.M.G. Wilson, H.M. Marchman, S.S.H. Naqvi, J.R. McNeil

Society of Photo-optical Instrumentation Engineers

Yedur, S., Vuong, V., Shivaprasad, D., Sarathy, T. P., Tabet, M., Korlahalli, R., Hu, J.

SPIE - The International Society of Optical Engineering

K. M. Lee, M. Tavassoli, M. Lau, K. Baik, B. Lieberman, S. Perlitz, U. Buttgereit, T. Scherubl

SPIE - The International Society of Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12