Interferogram analysis for flatness metrology [5972-48]
- Author(s):
Nascov, V. Timcu, A. Apostol, D. Garoi, F. Damian, V. Iordache, I. Logofatu, P.C. ( National Institute for Laser, Plasma and Radiation Physics (Romania) ) - Publication title:
- Advanced topics in optoelectronics, microelectronics, and nanotechnologies II : 24-26 November, 2004, Bucharest, Romania
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5972
- Pub. Year:
- 2005
- Page(from):
- 59721C
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819459916 [0819459917]
- Language:
- English
- Call no.:
- P63600/5972
- Type:
- Conference Proceedings
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