Rigorous coupled-wave analysis for two-dimensional gratings [5972-26]

Rigorous coupled-wave analysis for two-dimensional gratings [5972-26]

Author(s):: Logofatu, P.C. ( National Institute for Laser, Plasma, Radiation Physics (Romania) )
Publication title:: Advanced topics in optoelectronics, microelectronics, and nanotechnologies II : 24-26 November, 2004, Bucharest, Romania
Title of ser.:: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:: 5972
Pub. Year:: 2005
Page(from):: 59720Q
Pub. info.:: Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:: 0277786X
ISBN:: 9780819459916 [0819459917]
Language:: English
Call no.:: P63600/5972
Type:: Conference Proceedings

Details

TDL ID:	ZA00016009
Series ID:	PA00000029
Conf. info. (Name):	Optoelectronics, microelectronics, and nanotechnologies
Conf. info. (Number):	2004 : 2nd
Conf. info. (Venue):	Bucharest, Romania
Conf. info. (Date):	2004.11.24-2004.11.26

Similar Items:

1 Conference Proceedings Interferogram analysis for flatness metrology [5972-48] Nascov, V., Timcu, A., Apostol, D., Garoi, F., Damian, V., Iordache, I., Logofatu, P.C. SPIE - The International Society of Optical Engineering	7 Conference Proceedings Design of a volume phase holographic grating for astronomical observation using the rigorous coupled wave analysis [6180-48] Oka, K., Kashiwagi, M., Irisawa, M., Klaus, W., Kodate, K. SPIE - The International Society of Optical Engineering
2 Conference Proceedings Absolute measurement of length with nanometric resolution [5972-20] Apostol, D., Garoi, F., Timcu, A., Damian, V., Logofatu, P.C., Nascov, V. SPIE - The International Society of Optical Engineering	8 Conference Proceedings Optimal design and evaluation of a color separation grating using rigorous coupled wave analysis [6136-11] Nagayoshi. M, Oka. K, Klaus, W, Komai. Y, Kodate, K SPIE - The International Society of Optical Engineering
3 Conference Proceedings UV scatterometry Logofatu, P.C. SPIE-The International Society for Optical Engineering	9 Conference Proceedings Measurement precision of optical scatterometry Logofatu,P.C., McNeil,J.R. SPIE-The International Society for Optical Engineering
4 Conference Proceedings Rigorous coupled-wave analysis for multilayered grating structures Lee, W., Degertekin, F.L. SPIE-The International Society for Optical Engineering	10 Conference Proceedings Rigorous analysis of focusing grating couplers using a time-domain spectral collocation method Dinesen,P.G., Hesthaven,J.S., Lynov,J. SPIE - The International Society for Optical Engineering
5 Conference Proceedings Scatterometry: a metrology for subwavelength surface-relief gratings Logofatu,P.C., McNeil,J.R. SPIE-The International Society for Optical Engineering	11 Conference Proceedings Investigation of aluminum wire-grid polarizers for visible wavelengths using rigorous coupled wave analysis C. Hu, D. Liu Society of Photo-optical Instrumentation Engineers
6 Conference Proceedings Efficient and stable implementation of rigorous coupled-wave analysis for surface-relief gratings S. Peng, G.M. Morris Society of Photo-optical Instrumentation Engineers	12 Conference Proceedings Mass-producible microtags for security applications:Tolerance analysis by rigorous coupled-wave analysis Descour,M.R., Sweatt,W.C., Ray-Chaudhuri,A.K., Krenz,K.D., Tichenor,D.A., Stulen,R.H. SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12