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Absolute measurement of length with nanometric resolution [5972-20]

Author(s):
Apostol, D.
Garoi, F.
Timcu, A.
Damian, V.
Logofatu, P.C.
Nascov, V. ( National Institute for Laser Plasma and Radiation Physics (Romania) )
1 more
Publication title:
Advanced topics in optoelectronics, microelectronics, and nanotechnologies II : 24-26 November, 2004, Bucharest, Romania
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5972
Pub. Year:
2005
Page(from):
59720K
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819459916 [0819459917]
Language:
English
Call no.:
P63600/5972
Type:
Conference Proceedings

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