Critical dimension metrology using optical diffraction microscopy [5965-08]
- Author(s):
Agersnap, N. Hansen, P. -E. ( Luka OptoScope (Denmark) ) Petersen, J. C. Garnaes, J. ( Danish, Fundamental Metrology (Denmark) ) Destouches, N. Parriaux, O. ( Univ. of Saint-Etienne (France) ) - Publication title:
- Optical fabrication, testing and metrology II : 13-15 September 2005, Jena, Germany
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5965
- Pub. Year:
- 2005
- Page(from):
- 596508
- Page(to):
- 596508
- Pages:
- 1
- Pub. info.:
- Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819459831 [0819459836]
- Language:
- English
- Call no.:
- P63600/5965
- Type:
- Conference Proceedings
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