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Integrated nano-optic devices based on immersion nano-gratings made by imprint- lithography and nano-trench-filling technology [5931-13]

Author(s):
Wang, J.
Deng, X.
Sciortino, P.
Varghese, R.
Nikolov, A.
Liu, F.
Chen, L. ( NanoOpto Corp. (USA) )
2 more
Publication title:
Nanoengineering: fabrication, properties, optics, and devices II : 3-4 August, 2005, San Diego, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5931
Pub. Year:
2005
Page(from):
59310C
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819459367 [0819459364]
Language:
English
Call no.:
P63600/5931
Type:
Conference Proceedings

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