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Developments of nanoimprint technologies and applications (Invited Paper) [5931-12]

Author(s):
Ando, T.
Kuwabara, K.
Haginoya, C.
Ogino, M.
Ohashi, K.
Miyauchi, A. ( Hitachi Ltd. (Japan) )
1 more
Publication title:
Nanoengineering: fabrication, properties, optics, and devices II : 3-4 August, 2005, San Diego, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5931
Pub. Year:
2005
Page(from):
59310B
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819459367 [0819459364]
Language:
English
Call no.:
P63600/5931
Type:
Conference Proceedings

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