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Advanced metrology an essential support for the surface finishing of high performance x-rap optics [5921-01]

Author(s):
Siewert, F.
Lammert, H.
Noll, T.
Schlegel, T.
Zeschke, T. ( BESSY (Germany) )
Hansel, T.
Nickel, A.
Schindler, A. ( Leibniz Institute for Surface Modification e.V. (Germany) )
Grubert, B.
Schlewitt, C. ( Moeller-Wedel Optical GmbH (Germany) )
5 more
Publication title:
Advances in metrology for x-ray and EUV optics : 2-3 August 2005, San Diego, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5921
Pub. Year:
2005
Page(from):
592101
Page(to):
592101
Pages:
1
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819459268 [0819459267]
Language:
English
Call no.:
P63600/5921
Type:
Conference Proceedings

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