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Nano-positioning control of 5-DOF manipulator for alignment of condenser in soft x-ray microscopy system [5918-50]

Author(s):
Kim, G. K.
Kim, J. H.
Min, J. H.
Kim, K. W.
Kwon, Y. M. ( Wonkwang Univ,. (South Korea); )
Min. J. Y. ( LISTEM Co. (South Korea) )
Yoon, K. H. ( Wonkwang Unit (South Korea) )
2 more
Publication title:
Laser-generated, synchrotron, and other laboratory X-ray and EUV sources, optics, and applications II : 2-4 August 2005, San Diego, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5918
Pub. Year:
2005
Page(from):
59181A
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819459237 [0819459232]
Language:
English
Call no.:
P63600/5918
Type:
Conference Proceedings

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