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Compact EUV light sources for at-wavelength metrology (Invited Paper) [5918-08]

Author(s):
Owens, S. M. ( NASA Goddard Space Fligt Ct. (USA) )  
Publication title:
Laser-generated, synchrotron, and other laboratory X-ray and EUV sources, optics, and applications II : 2-4 August 2005, San Diego, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5918
Pub. Year:
2005
Page(from):
591807
Page(to):
591807
Pages:
1
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819459237 [0819459232]
Language:
English
Call no.:
P63600/5918
Type:
Conference Proceedings

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