Shaping of thin grazing-incidence reflection grating substrates via magnetorheological finishing [5900-09]
- Author(s):
Heilmann, R. K. Akilian, M. Chang, C.-H. ( MIT Kavli Institute for Astrophysics and Space Research (USA) ) Hallock, R. Cleaveland, E. ( QED Technologies (USA) ) Schattenburg, M. L. ( MIT Kavli Institute for Astrophysics and Space Research (USA) ) - Publication title:
- Optics for EUV, x-ray, and gamma-ray astronomy II : 3-4 August 2005, San Diego, California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5900
- Pub. Year:
- 2005
- Page(from):
- 590009
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819459053 [0819459054]
- Language:
- English
- Call no.:
- P63600/5900
- Type:
- Conference Proceedings
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