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Calibration of two-dimensional nanometer gratings using optical diffractometer and metrological atomic force microscope [5879-37]

Author(s):
Publication title:
Recent Developments in Traceable Dimensional Measurements III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5879
Pub. Year:
2005
Page(from):
58790Z
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819458841 [0819458848]
Language:
English
Call no.:
P63600/5879
Type:
Conference Proceedings

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