Design and implementation of high-performance and cost-effective while-light interferometric profile measurement systems [5878-53]

Design and implementation of high-performance and cost-effective while-light interferometric profile measurement systems [5878-53]

Author(s):

Chang, G.-W.
Lin, Y.-H.
Kuan, , C.-C. ( National Taiwan Norman Univ. (Taiwan) )

Publication title:

Advanced characterization techniques for optics, semiconductors, and nanotechnologies II : 2-4 August, 2005, San Diego, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5878

Pub. Year:

2005

Page(from):

58781C

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819458834 [081945883X]

Language:

English

Call no.:

P63600/5878

Type:

Conference Proceedings

Details

TDL ID:	ZA00015917
Series ID:	PA00000029
Conf. info. (Name):	Optics & Photonics : Advanced characterization techniques for optics, semiconductors, and nanotechnologies
Conf. info. (Number):	2005 : 2nd
Conf. info. (Venue):	San Diego, CA, USA
Conf. info. (Date):	2005.08.02-2005.08.04

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