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Atomic layer deposition of TiO2/Ai2O3 films for optical apllications [5870-23]

Author(s):
Triani, G.
Evans, P. J.
Mitchel, D. R. G.
Attard, D. J.
Finnie, K. S.
James, M.
Hanley, T.
Lafella, B.
Prince, K. E.
Bartiett, J. ( Australian Nuclear Science and Technology Organization (Australia) )
5 more
Publication title:
Advances in thin film coatings for optical applications II : 1-2 August 2005, San Diego, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5870
Pub. Year:
2005
Page(from):
587009
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819458759 [0819458759]
Language:
English
Call no.:
P63600/5870
Type:
Conference Proceedings

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