Sub-0.1μm optical track width measurement [5858-22]

Sub-0.1μm optical track width measurement [5858-22]

Author(s):

Smith, R. J.
See, C. W.
Somekh, M. G. ( Univ. of Nottingham (United Kingdom) )
Yacoot, A. ( National Physical Lab. (United Kingdom) )

Publication title:

Nano- and Micro-Metrology

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5858

Pub. Year:

2005

Page(from):

58580M

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819458582 [0819458589]

Language:

English

Call no.:

P63600/5858

Type:

Conference Proceedings

Details

TDL ID:	ZA00015897
Series ID:	PA00000029
Conf. info. (Name):	Optical Metrology : Nano- and Micro-Metrology
Conf. info. (Number):	2005
Conf. info. (Venue):	Munich, Germany
Conf. info. (Date):	2005.06.16-2005.06.17

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