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Influence of the real-life structures in optical metrology using spectroscopic scatterometry analysis [5858-12]

Author(s):
Publication title:
Nano- and Micro-Metrology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5858
Pub. Year:
2005
Page(from):
58580C
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819458582 [0819458589]
Language:
English
Call no.:
P63600/5858
Type:
Conference Proceedings

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