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Close infrared thermography using an intensified CCD camera: application in nondestructive high resolution evaluation of electrothermally actuated MEMS [5856-117]

Author(s):
Serio, B.
Hunsinger, J. J. ( FEMTO-ST/CNRS, LPMO (France) )
Conseil, F.
Derderian, P. ( MBDA France (France) )
Collard, D.
Buchaillot, L. ( Institut d’Electronique de Micro-Electronique et de Nanotechnologie (France) )
Ravat, M. F. ( MBDA France (France) )
2 more
Publication title:
Optical Measurement Systems for Industrial Inspection IV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5856
Pub. date:
2005
Pt.:
2
Page(from):
819
Page(to):
829
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819458568 [0819458562]
Language:
English
Call no.:
P63600/5856
Type:
Conference Proceedings

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