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Design methodology of microstructures for enhanced mechanical reliability [5852-51]

Author(s):
  • Wittler, O. ( Technische Univ. Berlin (Germany) )
  • Walter, H. ( AMIC GmbH (Germany) )
  • Vogel, D. ( Fraunhofer-Institut fur Zuverlassigkeit und Mikrointegration (Germany) )
  • Keller, J. ( AMIC GmbH (Germany) )
  • Michel, B. ( Fraunhofer-Institut fur Zuverlassigkeit und Mikrointegration (Germany) )
Publication title:
Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5852
Pub. Year:
2005
Pt.:
1
Page(from):
316
Page(to):
320
Pages:
5
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819458520 [081945852X]
Language:
English
Call no.:
P63600/5852
Type:
Conference Proceedings

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