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Nanocavity Structures produced by ion implantation into silicon for semiconductor applications

Author(s):
Publication title:
Nanostructured and advanced materials for applications in sensor, optoelectronic and photovoltaic technology
Title of ser.:
NATO science series. Series 2, Mathematics, physics and chemistry
Ser. no.:
204
Pub. Year:
2006
Page(from):
299
Page(to):
309
Pages:
11
Pub. info.:
Dordrecht: Springer
ISBN:
9781402035609 [1402035608]
Language:
English
Call no.:
N17050/204
Type:
Conference Proceedings

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