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Preparation and Evaluation of Damage Free Surfaces on Silicon Carbide

Author(s):
Everson, W.J.
Heydemann, V.D.
Gamble, R.D.
Snyder, D.W.
Goda, G.
Skowronski, M.
Grim, J.
Berkman, E.
Redwing, J.M.
Acord, J.D.
5 more
Publication title:
Silicon carbide and related materials - 2005 : proceedings of the International Conference on Silicon Carbide and Related Materials - 2005 : Pittsburgh, Pennsylvania, USA : September 18-23 2005
Title of ser.:
Materials science forum
Ser. no.:
527-529
Pub. date:
2006
Pt.:
2
Page(from):
1091
Page(to):
1094
Pages:
4
Pub. info.:
Stafa-Zuerich: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878494255 [0878494251]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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