Blank Cover Image

Development and Investigation on ERAS-100 of 100 mm Diameter Wafer for 4H-SiC Post Ion Implantation Annealing

Author(s):
Shibagaki, M.
Satoh, M
Kurematsu, Y.
Numajiri, K.
Watanabe, F.
Haga, S.
Miura, K.
Suzuki, T.
Miyagawa, S.
4 more
Publication title:
Silicon carbide and related materials - 2005 : proceedings of the International Conference on Silicon Carbide and Related Materials - 2005 : Pittsburgh, Pennsylvania, USA : September 18-23 2005
Title of ser.:
Materials science forum
Ser. no.:
527-529
Pub. date:
2006
Pt.:
2
Page(from):
807
Page(to):
810
Pages:
4
Pub. info.:
Stafa-Zuerich: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878494255 [0878494251]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

Similar Items:

Shibagaki, M., Kurematsu, Y., Watanabe, F., Haga, S., Miura, K., Suzuki, T., Satoh, M.

Trans Tech Publications

M. Satoh, S. Nagata, T. Nakamura, H. Doi, M. Shibagaki

Trans Tech Publications

Masami Shibagaki, Akihiro Egami, Akira Kumagai, Kenji Numajiri, Fumio Watanabe, Shigetaka Haga, Kuniaki Miura, Shingo …

Materials Research Society

Y. Suzuki, E. Taguchi, S. Nagata, M. Satoh

Trans Tech Publications

A. Egami, M. Shibagaki, A. Kumagai, K. Numajiri, S. Miyagawa, T. Kudo, S. Uchiumi, M. Satoh

Trans Tech Publications

E. Taguchi, Y. Suzuki, M. Satoh

Trans Tech Publications

M. Satoh, S. Miyagawa, T. Kudoh, A. Egami, K. Numajiri

Trans Tech Publications

Satoh, M.

Trans Tech Publications

Satoh, M., Suzuki, T., Miyagawa, S.

Trans Tech Publications

Satoh, M.

Trans Tech Publications

S. Miyagawa, T. Suzuki, T. Kudo, M. Satoh

Trans Tech Publications

T. Sugimoto, M. Satoh, T. Nakamura, K. Mashimo, H. Doi

Trans Tech Publications

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12