Processing of Poly-SiC Substrates with Large Grains for Wafer-Bonding

Processing of Poly-SiC Substrates with Large Grains for Wafer-Bonding

Author(s):

Chichignoud, G.

Publication title:

Silicon carbide and related materials - 2005 : proceedings of the International Conference on Silicon Carbide and Related Materials - 2005 : Pittsburgh, Pennsylvania, USA : September 18-23 2005

Title of ser.:

Materials science forum

Ser. no.:

527-529

Pub. Year:

2006

Pt.:

1

Page(from):

71

Page(to):

74

Pages:

4

Pub. info.:

Stafa-Zuerich: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878494255 [0878494251]

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00015830
Series ID:	PA00000012
Conf. info. (Name):	International Conference on Silicon Carbide and Related Materials
Conf. info. (Number):	2005
Conf. info. (Venue):	Pittsburgh, Pennsylvania, USA
Conf. info. (Date):	2005.09.18-2005.09.23

Similar Items:

1 Conference Proceedings Investigation of Defects in 4H-SiC by Synchrotron Topography, Raman Spectroscopy Imaging and Photoluminescence Spectroscopy Imaging Pernot, E., El Harrouni, I., Mermoux, M., Bluet, J.M., Anikin, M., Chaussende, D., Pons, M., Madar, R. Trans Tech Publications	7 Conference Proceedings In Situ SiC Feeding by Chemical Vapor Deposition for Bulk Growth Charpentier, L., Baillet, F., Chaussende, D., Auvray, L., Pons, M., Pernot, E., Madar, R. Trans Tech Publications
2 Conference Proceedings Electron Back Scattering Diffraction (EBSD) as a Tool for the Investigation of 3C-SiC Nucleation and Growth on 6H or 4H Chaussende, D., Chaudouet, P., Auvray, L., Pons, M., Madar, R. Trans Tech Publications	8 Conference Proceedings Epitaxial Growth on Metal Bonded SiC Substrates: Transmission Electron Microscopy and Photoluminescence I. Matko, B. Chenevier, J.M. Bluet, R. Madar, F. Letertre, W. Saikaly Trans Tech Publications
3 Conference Proceedings Characterization of Thick 2-Inch 4H-SiC Layers Grown by the Continuous Feed-Physical Vapor Transport Method Chaussende, D., Balloud, C., Auvray, L., Baillet, F., Zielinski, M., Juillaguet, S., Mermoux, M., Pernot, E., Camassel, … Trans Tech Publications	9 Conference Proceedings Experimental Investigation of 4H-SiC Bulk Crystal Growth Chourou,K., Anikin,M., Bluet,J.M., Lauer,V., Guillot,G., Camassel,J., Juillaguet,S., Chaix,O., Pons,M., Madar,R. Trans Tech Publications
4 Conference Proceedings QuaSiC Smart-Cut Substrates for SiC High Power Devices Letertre, F., Jalaguier, E., Di Cioccio, L., Templier, F., Bluet, J.M., Banc, C., Matko, I., Chenevier, B., Bano, E., … Trans Tech Publications	10 Conference Proceedings Micro-Optical Characterization Study of Highly p-Type Doped SiC:Al Wafers Wellmann, P. J., Muller, R., Pons, M., Thuaire, A., Crisci, A., Mermoux, M., Auvray, L. Trans Tech Publications
5 Conference Proceedings QuaSiC Smart-Cut Substrates for SiC High Power Devices Letertre, F., Jalaguier, E., Cioccio, L. D., Templier, F., Bluet, J.M., Banc, C., Matko, I., Chenevier, B., Bano, E., … Trans Tech Publications	11 Conference Proceedings Enlargemcnt of SiC Crystals:Defect Formation at the Interfaces Anikin,M., Pons,M., Chourou,K., Chaix,O., Bluet,J.M., Lauer,V., Madar,R. Trans Tech Publications
6 Conference Proceedings SiC Power Devices on QUASIC and SiCOI Smart-CutR Substrates: First Demonstrations Letertre, F., Daval, N., Templier, F., Bano, E., Planson, D., Di Cioccio, L., Jalaguier, E., Bluet, J.M., Billon, T., … Trans Tech Publications	12 Conference Proceedings Investigation into the Film Growth of AIN on SiC by Low Pressure Chemical Vapour Deposition Williams, V., Pernot, E., Ramberg, E., Blanquet, E., Bluet, J. M., Madar, R. Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12