The Method for Enhancing Nitrogen Doping in 6H-SiC Single Crystals Grown by Sublimation Process: The Effect of Si Addition in SiC Powder Source

The Method for Enhancing Nitrogen Doping in 6H-SiC Single Crystals Grown by Sublimation Process: The Effect of Si Addition in SiC Powder Source

Author(s):

Kim, K.M.

Publication title:

Silicon carbide and related materials - 2005 : proceedings of the International Conference on Silicon Carbide and Related Materials - 2005 : Pittsburgh, Pennsylvania, USA : September 18-23 2005

Title of ser.:

Materials science forum

Ser. no.:

527-529

Pub. Year:

2006

Pt.:

1

Page(from):

55

Page(to):

58

Pages:

4

Pub. info.:

Stafa-Zuerich: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878494255 [0878494251]

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00015830
Series ID:	PA00000012
Conf. info. (Name):	International Conference on Silicon Carbide and Related Materials
Conf. info. (Number):	2005
Conf. info. (Venue):	Pittsburgh, Pennsylvania, USA
Conf. info. (Date):	2005.09.18-2005.09.23

Similar Items:

1 Conference Proceedings The Influence of SiC Powder Source on 6H-SiC Single Crystals Grown by the Sublimation Method Kim, J.W., Seo, S.H., Kim, K.M., Song, J.S., Kim, T.S., Oh, M.H. Trans Tech Publications	7 Conference Proceedings Damage Relaxation Pre-Activation Anneal in Al-Implanted SiC Bahng, W., Song, G.H., Kim, N.K., Kim, S.C., Seo, K.S., Kim, H.W., Kim, E.D. Trans Tech Publications
2 Conference Proceedings Micro-Raman Investigation of Growth-Induced Defects in 6H and 4H SiC Crystals Grown by Sublimation Method Seo, S.H., Park, J.H., Song, J.S., Oh, M.H. Trans Tech Publications	8 Conference Proceedings Co-Formation of Gate Electrode and Ohmic Contacts in SiC Power MOSFETs Song, G.H., Bahng, W., Kim, N.K., Kim, S.C., Seo, K.S., Kim, E.D. Trans Tech Publications
3 Conference Proceedings Growth of 2 Inches 6H-SiC Single Crystals by Sublimation Method: The Comparison of α- and β-SiC Powders Seo, S. H., Song, J. S., Oh, M. H., Wang, Y. Z. Trans Tech Publications	9 Conference Proceedings Dislocation Analysis of 4H-/6H-SiC Single Crystals Using Micro-Raman Spectroscopy Y.J. Shin, W.J. Kim, H.Y. Kim, W. Bahng Trans Tech Publications
4 Conference Proceedings Effect of Carbonization in Bias-Enhanced Nucleation Step during Highly-Oriented Growth of Diamond Films on 6H-SiC(0001) Substrate Seo, S.H., Lee, T.H., Park, J.S., Song, J.S., Oh, M.H. Trans Tech Publications	10 Conference Proceedings Study of Nitrogen Incorporation in 6H-SiC Single Crystals Grown by PVT Schulz, D., Irmscher, K., Dolle, J., Eiserbeck, W., Muller, T., Rost, H. -J., Siche, D., Wagner, G., Wollweber, J. Trans Tech Publications
5 Conference Proceedings Shape of SiC Bulk Single Crystal Grown by Sublimation Nishizawa, S., Kitou, Y., Bahng, W., Oyanagi, N., Khan, M. N., Arai, K. Trans Tech Publications	11 Conference Proceedings Effect of the Doping Concentration and Space of Both p-Grid and Field Limiting Ring on 4H-SiC Junction Barrier Schottky Diode with Single Ion Implantation … I.H. Kang, J.Y. Song, S.J. Joo, W. Bahng, S.C. Kim Trans Tech Publications
6 Conference Proceedings Evolution Roots of Growth-Induced Polytype Domains in 6H-SiC Single Crystals Seo, S. H., Song, J. S., Oh, M. H., Wang, Y. Z. Trans Tech Publications	12 Conference Proceedings Trench Formation on Ion Implanted SiC Surfaces after Thermal Oxidation Bahng, W., Song, G. H., Kim, N. K., Kim, S. C., Kim, H. W., Seo, K. S., Kim, E. D. Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12