Effects of Annealing Atmosphere on the Optoelectrical Properties of ZnO Thin Films Grown by Atomic Layer Deposition

Effects of Annealing Atmosphere on the Optoelectrical Properties of ZnO Thin Films Grown by Atomic Layer Deposition

Author(s):

Publication title:

Eco-materials processing & design VII : proceedings of the Conference of the 7th International Symposium on Eco-materials Processing & Design, January 8-11 2006, Chengdu, China

Title of ser.:

Materials science forum

Ser. no.:

510-511

Pub. Year:

2006

Page(from):

670

Page(to):

673

Pages:

4

Pub. info.:

Uetikon-Zuerich: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878499953 [0878499954]

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00015820
Series ID:	PA00000012
Conf. info. (Name):	International Symposium on Eco-materials Processing & Design
Conf. info. (Number):	7th
Conf. info. (Venue):	Chengdu, China
Conf. info. (Date):	2006.01.08-2006.01.11

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