Advanced Process Control Expert System of CVD Membrane Thickness Based on Neural Network
- Author(s):
- Publication title:
- Progress on advanced manufacture for micro/nano technology 2005 : proceedings of the 2005 International Conference on Advanced Manufacture Taipei, Taiwan, R.O.C. November 28th-December 2nd, 2005
- Title of ser.:
- Materials science forum
- Ser. no.:
- 505-507
- Pub. Year:
- 2006
- Pt.:
- 1
- Page(from):
- 313
- Page(to):
- 318
- Pages:
- 6
- Pub. info.:
- Uetikon-Zuerich: Trans Tech Publications
- ISSN:
- 02555476
- ISBN:
- 9780878499908 [0878499903]
- Language:
- English
- Call no.:
- M23650
- Type:
- Conference Proceedings
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