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Applications of TiN Thin Films in Si Device Technology

Author(s):
Publication title:
Thin films and interfaces : proceedings of the Materials Research Society Annual Meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
10
Pub. Year:
1982
Page(from):
409
Page(to):
418
Pages:
10
Pub. info.:
New York: North-Holland
ISSN:
02729172
ISBN:
9780444007742 [0444007741]
Language:
English
Call no.:
M23500/10
Type:
Conference Proceedings

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