PULSED ION BEAM ANNEALING OF NICKEL THIN FIlMS ON SILICON
- Author(s):
- Publication title:
- Metastable materials formation by ion implantation : proceedings of the Materials Research Society annual meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 7
- Pub. Year:
- 1982
- Page(from):
- 319
- Page(to):
- 326
- Pages:
- 8
- Pub. info.:
- New York: North-Holland
- ISSN:
- 02729172
- ISBN:
- 9780444006929 [0444006923]
- Language:
- English
- Call no.:
- M23500/7
- Type:
- Conference Proceedings
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