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PULSED BEAMS AND ION BEAM MIXING: METAL-Si AND METAL-METAL STRUCTURES*

Author(s):
Mayer, J. W.
Fastow, R.
Galvin, G.
Hung, L. S.
Nastasi, M.
Thompson, M. O.
Zheng, L. R.
2 more
Publication title:
Metastable materials formation by ion implantation : proceedings of the Materials Research Society annual meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
7
Pub. Year:
1982
Page(from):
125
Page(to):
132
Pages:
8
Pub. info.:
New York: North-Holland
ISSN:
02729172
ISBN:
9780444006929 [0444006923]
Language:
English
Call no.:
M23500/7
Type:
Conference Proceedings

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