Scalling of Statistical and Physical Electromigration Characteristics in Cu Interconnects
- Author(s):
Gall, Martin Hauschildt, Meike Justison, Patrick Ramakrishna, Konero Hernandez, Richard Herrick Matthew Michaelson Lynne Kawasaki, Hisao - Publication title:
- Materials, technology and reliability of low-k dielectrics and copper interconnects : symposium held April 18-21, 2006, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 914
- Pub. Year:
- 2006
- Page(from):
- 305
- Page(to):
- 316
- Pages:
- 12
- Pub. info.:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558998705 [1558998705]
- Language:
- English
- Call no.:
- M23500/914
- Type:
- Conference Proceedings
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