Blank Cover Image

Structures and Properties of an Ultra-Low-k Material: Classical-Molecular-Dynamics and First-Principles Calculations

Author(s):
Ushio, Jiro
Hamada, Tomoyuki
Ohno, Takahisa
Nakao, Shin-Ichi
Yoneda, Katsumi
Kato, Manabu
Kobayashi, Nobuyashi
2 more
Publication title:
Materials, technology and reliability of low-k dielectrics and copper interconnects : symposium held April 18-21, 2006, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
914
Pub. date:
2006
Page(from):
21
Page(to):
26
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558998705 [1558998705]
Language:
English
Call no.:
M23500/914
Type:
Conference Proceedings

Similar Items:

Ohno, Takahisa, Sasaki, Taizo, Taguchi, Akihito

MRS - Materials Research Society

T. Yamasaki, N. Tajima, T. Kaneko, N. Nishikawa, J. Nara

Trans Tech Publications

Ohno, Takahisa, Higai, Shin'ichi

Materials Research Society

Mohri, T., Ohno, M., Chen, Y.

Trans Tech Publications

9 Conference Proceedings First-Principles Molecular Dynamics.

Galli G., Pasquarello A., .

Kluwer Academic Publishers

Nakao, Shin-ichi, Kimura, Shoji

American Chemical Society

Matsuoka, Hiroshige, Kato, Takahisa

The American Society of Mechanical Engineers

Shin-ichi Nakao, Masaki Takamoto

American Society of Mechanical Engineers

Konishi, Yoshinori, Ohsawa, Michio, Yonezawa, Yoshiyuki, Tanimura, Yoshiya, Chikyow, Toyohiro, Wakisaka, Toshiyuki, …

Materials Research Society

Umino, Shin-ichi, Hamada, Akihiro, Kenmoku, Takeji, Nishizawa, Yoshitaka

Society of Automotive Engineers

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12