DIFFUSION OF HYDROGEN IN AMORPHOUS SILICON IN THE LOW CONCENTRATION REGIME

DIFFUSION OF HYDROGEN IN AMORPHOUS SILICON IN THE LOW CONCENTRATION REGIME

Author(s):

Publication title:

Amorphous silicon technology, 1993 : Symposium held April 13-16, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

297

Pub. Year:

1993

Page(from):

291

Page(to):

296

Pages:

6

Pub. info.:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558991934 [155899193X]

Language:

English

Call no.:

M23500/297

Type:

Conference Proceedings

Details

TDL ID:	ZA00015781
Series ID:	PA00000011
Conf. info. (Name):	Symposium on amorphous silicon technology
Conf. info. (Number):	1993
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1993.04.13-1993.04.16

Similar Items:

1 Conference Proceedings THE EFFECT OF HYDROGEN ON THE KINETICS OF SOLID PHASE EPITAXY IN AMORPHOUS SILICON Roth, J.A., Olson, G.L., Jacobson, D.C., Poate, J.M., Kirschbaum, C. Materials Research Society	7 Conference Proceedings CHANGING THE STRUCTURAL STATE OF AMORPHOUS SILICON BY ION IRRADIATION Roorda, S., Sinke, W.C., Poate, J.M., Jacobson, D.C., Dierker, S., Dennis, B.S., Eaglesham, D.J., Spaepen, F. Materials Research Society
2 Conference Proceedings DIFFUSION, SOLUBILITY AND SEGREGATION OF IMPLANTED Cu, Ag AND Au IN AMORPHOUS Si Jacobson, D.C., Elliman, R.G., Gibson, J.M., Olson, G.L., Poate, J.M., Williams, J.S. Materials Research Society	8 Conference Proceedings DENSITY MEASUREMENTS OF ION IMPLANTED AMORPHOUS SILICON Custer, J.S., Thompson, Michael O., Jacobson, D.C., Poate, J.M., Roorda, S., Sinke, W.C., Spaepen, F. Materials Research Society
3 Conference Proceedings Diffusion of gold in amorphous silicon Frank,W., Gustin,W., Coffa,S., Poate,J.M., Jacobson,D.C. Trans Tech Publications	9 Conference Proceedings THE EFFECT OF SELF-IMPLANTATION ON THE INTERDIFFUSION OF AMORPHOUS Si/Ge MULTILAYERS Park, B., Spaepen, F., Poate, J.M., Jacobson, D.C. Materials Research Society
4 Conference Proceedings IMPURITY DIFFUSION, CRYSTALLIZATION AND PHASE SEPARATION IN AMORPHOUS SILICON Elliman, R.G., Poate, J.M., Williams, J.S., Gibson, J.M., Jacobson, D.C., Sood, D.K. Materials Research Society	10 Conference Proceedings CHANGING SEGREGATION COEFFICIENTS DURING ION BEAM INDUCED EPITAXY OF AMORPHOUS Si Custer, J.S., Thompson, Michael O., Jacobson, D.C., Poate, J.M. Materials Research Society
5 Conference Proceedings Ion Implantation: The Critical Roles of Defects, Diffusion, and Dopant Profile Control Jacobson, D.C., Poate, J.M. Electrochemical Society	11 Conference Proceedings CHANGING SEGREGATION COEFFICIENTS DURING ION BEAM INDUCED EPITAXY OF AMORPHOUS Si Custer, J.S., Thompson, Michael O., Jacobson, D.C., Poate, J.M. Materials Research Society
6 Conference Proceedings EFFECTS OF IMPURITIES ON THE KINETICS OF NUCLEATION AND GROWTH IN AMORPHOUS SILICON Roth, J.A., Olson, G.L. Materials Research Society	12 Conference Proceedings THE ENHANCEMENT OF THE INTERDIFFUSIN IN Si/Ge AMORPHOUS ARTIFICAL MULTILAYERS BY ADDITIONS OF B AND Au Park, B., Spaepen, F., Poate, J.M., Jacobson, D.C. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12