INVESTIGATION ON MICROVOIDS IN PECVD a-Si:H
- Author(s):
Manfredotti, C. Fizzotti, F. Boero, M. Pastorino, P. Vittone, E. Rigato, V. - Publication title:
- Amorphous silicon technology, 1993 : Symposium held April 13-16, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 297
- Pub. Year:
- 1993
- Page(from):
- 231
- Page(to):
- 236
- Pages:
- 6
- Pub. info.:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558991934 [155899193X]
- Language:
- English
- Call no.:
- M23500/297
- Type:
- Conference Proceedings
Similar Items:
Materials Research Society |
Materials Research Society |
MRS - Materials Research Society |
MRS - Materials Research Society |
3
Conference Proceedings
Monte Carlo simulation of a CdTe gamma-ray spectrometer: best time and energy resolution performances
Society of Photo-optical Instrumentation Engineers |
Trans Tech Publications |
4
Conference Proceedings
A PARTICULAR PHOTO-CVD APPARATUS FOR HYDROGENATED AMORPHOUS SILICON DEPOSITION
Materials Research Society |
MRS - Materials Research Society |
Electrochemical Society |
MRS - Materials Research Society |
MRS - Materials Research Society |
12
Conference Proceedings
CVD diamond wires and tips for x-ray detection:growth and characterization by SEM and micro-Raman spectroscopy
SPIE - The International Society for Optical Engineering |