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PRODUCTION OF SILICON POWDER BY SQUARE-WAVE MODULATED RF SILANE PLASMA

Author(s):
Costa, J.
Sardin, G.
Campmany, J.
Andujar, J.L.
Canillas, A.
Bertran, E.
1 more
Publication title:
Nanophase and nanocomposite materials : symposium held December 1-3, 1992, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
286
Pub. Year:
1993
Page(from):
155
Page(to):
160
Pages:
6
Pub. info.:
Pittsburg, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991811 [1558991816]
Language:
English
Call no.:
M23500/286
Type:
Conference Proceedings

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