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*LOW TEMPERATURE SYNTHESIS OF SILICON OXIDE AND OXYNITRIDE FILMS BY REACTIVE LASER ABLATION

Author(s):
Fogarassy, E.
Fuchs, C.
Slaoui, A.
De Unamuno, S.
Stoquert, J.-P.
Marine, W.
Lang, B.
2 more
Publication title:
Laser ablation in materials processing : fundamentals and applications : symposium held December 1-4, 1992, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
285
Pub. Year:
1993
Page(from):
319
Page(to):
330
Pages:
12
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991804 [1558991808]
Language:
English
Call no.:
M23500/285
Type:
Conference Proceedings

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