COMPOUND SIDEWALL SPACER TECHNOLOGY FOR SUBMICRON MOSFET
- Author(s):
- Publication title:
- Amorphous insulating thin films : symposium held December 1-4, 1992, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 284
- Pub. Year:
- 1993
- Page(from):
- 449
- Page(to):
- 456
- Pages:
- 8
- Pub. info.:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558991798 [1558991794]
- Language:
- English
- Call no.:
- M23500/284
- Type:
- Conference Proceedings
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