Blank Cover Image

ELECTRICAL PROPERTIES OF OXIDE-NITRIDE-OXIDE, ONO, HETEROSTRUCTURES FABRICATED BY LOW TEMPERATURE REMOTE PECVD

Author(s):
Publication title:
Amorphous insulating thin films : symposium held December 1-4, 1992, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
284
Pub. Year:
1993
Page(from):
147
Page(to):
152
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991798 [1558991794]
Language:
English
Call no.:
M23500/284
Type:
Conference Proceedings

Similar Items:

Turner, W.A., Williams, M.J., Chen, Y.L., Maher, D.M., Lucovsky, G.

Materials Research Society

Chen, Y.L., Maher, D.M.

Materials Research Society

Yasuda, T., ma, Y., Lucovsky, G.

Materials Research Society

Lucovsky, G., Wang, C., Williams, M.J., Chen, Y.L., Maher, D.M.

Materials Research Society

Lucovsky, G., Ma, Y., He, S.S., Yasuda, T., Stephens, D.J., Habermehl, S.

Materials Research Society

Chen, Y.L., Bentley, J., Wang, C., Lucovsky, G., Maher, D.M.

Materials Research Society

Ma, Y., Yasuda, T., Habermehl, S., Lucovsky, G.

Materials Research Society

Ma, Y., Yasuda, T., Habermehl, S., Lucovsky, G.

Materials Research Society

Ma, Y., Yasuda, T., Habermehl, S., He, S.S., Stephens, D.J., Lucovsky, G.

Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12