HIGH-QUALITY POLYCRYSTALLINE SILICON THIN FILMS PREPARED BY SOLID PHASE CRYSTALLIZATION (SPC) METHOD

HIGH-QUALITY POLYCRYSTALLINE SILICON THIN FILMS PREPARED BY SOLID PHASE CRYSTALLIZATION (SPC) METHOD

Author(s):

Matsuyama, T.

Publication title:

Microcrystalline semiconductors : materials science & devices : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

283

Pub. Year:

1993

Page(from):

727

Page(to):

732

Pages:

6

Pub. info.:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558991781 [1558991786]

Language:

English

Call no.:

M23500/283

Type:

Conference Proceedings

Details

TDL ID:	ZA00015767
Series ID:	PA00000011
Conf. info. (Name):	Symposium on microcrystalline semiconductors
Conf. info. (Number):	1992
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1992.11.30-1992.12.04

Similar Items:

1 Conference Proceedings HIGH-QUALITY POLYCRYSTALLINE SILICON THIN FILM PREPARED BY A SOLID PHASE CRYSTALLIZATION METHOD Baba, T., Matsuyama, T., Sawada, T., Takahama, T., Wakisaka, K., Tsuda, S. MRS - Materials Research Society	7 Conference Proceedings HIGH QUALITY a-Si FILMS AND SUPERLATTICE STRUCTUR p-LAYER a-Si SOLAR CELLS Nakano, S., Tsuda, S., Takahama, T., Haku, H., Watanabe, K., Nishikuni, M., Hishikawa, Y., Kuwano, Y. Materials Research Society
2 Conference Proceedings *PREPARATION OF HIGH-QUALITY poly-Si AND μc-Si FILMS BY THE SPC METHOD Matsuyama, T., Nishikuni, M., Kameda, M., Okamoto, S., Tanaka, M., Tsuda, S., Ohnisi, M., Nakano, S., Kuwano, Y. Materials Research Society	8 Conference Proceedings PREPARATION OF HIGH-QUALITY a-SiGe:H FILMS WITH LOW IMPURITY CONCENTRATION BY THE HYDROGEN DILUTION METHOD Sayama, K., Haku, H., Dohjoh, H., Isomura, M., Nakamura, N., Tsuda, S., Kishi, Y., Nakano, S., Kuwano, Y. Materials Research Society
3 Conference Proceedings HIGH-QUALITY a-Si-BASED ALLOYS: a-SiGe FILMS FABRICATED IN A SUPER CHAMGER AND SURPERLATTICES STRUCTURE a-Si FILMS PREPARED BY A PHOTO-CVD METHOD Tsuda, S., Haku, H., Tarui, H., Matsuyama, T., Sayama, K., Nakashima, Y., Nakano, S., Ohnishi, M., Kuwano, Y. Materials Research Society	9 Conference Proceedings Fabrication of Polycrystalline Si Thin Film for Solar Cells Tanaka, M., Tsuge, S., Kiyoma, S., Tsuda, S., Nakano, S. MRS - Materials Research Society
4 Conference Proceedings *HIGH-QUALITY AMORPHOUS SILICON CARBIDE PREPARED BY A NEW FABRICATION METHOD FOR A WINDOW P-LAYER OF SOLAR CELLS Ninomiya, K., Haku, H., Tarui, H., Nakamura, N., Tanaka, M., Wakisaka, K., Tsuda, S., Nishiwaki, H., Nakano, S., Kuwano, … Materials Research Society	10 Conference Proceedings *HIGH QUALITY P-TYPE a-SiC FILM DOPED WITH B(CH3)3 AND ITS APPLICATION TO a-Si SOLAR CELLS Kuwano, Y., Tsuda, S. Materials Research Society
5 Conference Proceedings HIGH QUALITY a-Si FILMS PREPARED BY THE DIRECT PHOTO-CVD METHOD Nakano, S., Wakisak, K., Kameda, M., Isomura, M., Matsuyama, t., Nakamura, N., Tsuda, S., Ohnishi, M., Kuwano, Y. Materials Research Society	11 Conference Proceedings A COMPARATIVE STUDY OF DEFECT STATES IN LIGHTSOAKED AND HIGH-TEMPERATURE-ANNEALED a-Si:H Saleh, Z.M., Tarui, H., Tsuda, S., Nakano, S., Kuwano, Y. Materials Research Society
6 Conference Proceedings * A MORE THAN 18% EFFICIENCY HIT STRUCTURE a-Si/c-Si SOLAR CELL USING ARTIFICIALLY CONSTRUCTED JUNCTION (ACJ) Kuwano, Y., Nakano, S., Tanaka, M., Takahama, T., Matsuyama, T., Isomura, M., Nakamura, N., Haku, H., Nishikuni, M., … Materials Research Society	12 Conference Proceedings High-Quality Poly-Si Films Using an Excimer Laser Annealing Method for Giant-Microelectronics Application Kuriyama, H., Kuwahara, T., Wakisaka, K., Kiyama, S., Tsuda, S., Nakano, S. Electrochemical Society

1

2

3

4

5

6

7

8

9

10

11

12