Blank Cover Image

CONSECUTIVE SELECTIVE CHEMICAL VAPOR DEPOSITION OF COPPER AND ALUMINUM FROM ORGANOMETALLIC PRECURSORS

Author(s):
Publication title:
Chemical perspectives of microelectric materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
282
Pub. Year:
1993
Page(from):
329
Page(to):
334
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991774 [1558991778]
Language:
English
Call no.:
M23500/282
Type:
Conference Proceedings

Similar Items:

Fine, Stephen M., Dyer, Paul N., Norman, John A.T., Muratore, Beth A., Iampietro, Robert L.

Materials Research Society

Beach, David B., Kane, William F., Legoues, Francoise K., Knors, Christopher J.

Materials Research Society

Healy, Matthew D., Norman, John A. T., Hochberg, Arthur K.

MRS - Materials Research Society

Rutherfold,N.M., Larson, C.E., Jackson, R.L.

Materials Research Society

Gladfelter, Wayne L., Boyd, David C., Hwang, Jen-Wei, Haasch, Richard T., Evans, John F., Ho, Kwok-Lun, Jensen, Klavs F.

Materials Research Society

Shin, H. -K., Hampden-Smith, M. J., Kodas, T. T., Duesler, E.. N., Farr, J. D., Paffett, M.

Materials Research Society

Hans, Jaesung, Jensen, Klavs F., Norman, John A. T.

Materials Research Society

Norman, John A.T., Roberts, David A., Hochberg, Arthur K.

Materials Research Society

Stupik, Paul D., Cheatham, Linda K., Graha, John J., Barron, Andrew R. Barron

Materials Research Society

Jain, Ajay, Farkas, J., Kodas, T. T., Hampden-Smith, M. J., Gelatos, A. V., Marsh, R., Mogab, C. J.

MRS - Materials Research Society

G. A. Peterson, T.R. omstead, P.M. Smith, M.F. Gonzales

Electrochemical Society

Zanella,P., Battiston,G.A., Carta,G., Gerbasi,R., Porshia,M., Rossetto,G.

Trans Tech Publications

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12